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Nanotechnology: Commission launches consultation on how best to assess health and environmental risks

October 20, 2005

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Sponsored by MINOS-EURONET
http://www.minos-euro.net/ 
               

SHORT COURSE
Automatic Compact Modelling for MEMS: Applications, Methods and Tools

Date: 26 May 2006
Time: 13:00-17:00 (4x40 min lectures with short breaks)
Place: Engineering Building, Room: ENG 208

Please send E-mail to: eelmaci@ku.edu.tr to register for this event

 Author: Evgenii B. Rudnyi,
Affiliation: IMTEK, University of Freiburg, Department of Microsystems Engineering
e-mail: rudnyi@imtek.uni-freiburg.de
Web-site: http://www.imtek.uni-freiburg.de/simulation/mor4ansys/

Abstract:
The course goal is to learn how to use model reduction in practice. The course is made for engineers that use high-dimensional finite-element models during device simulation. The course is an overview on how to produce compact models directly from the FEM models for system-level simulation based on modern mathematical approaches (model order reduction).

The design of MEMS-based devices often depends heavily on 3D time-dependent simulation of coupled physical partial differential equations in the thermal, mechanical, electrical, etc. domains. This in turn requires the solution of very large systems of ordinary differential equations (ODEs), resulting from the spatial discretization of the device that comes from a finite element program.

However, instead of the "brute force" approach to integrate a large system of ODEs, one can use modern mathematical methods to drastically reduce the size of the simulation, and thereby achieve dramatic speedup in the calculation. It is also now possible to solve large simulations that were previously simply too large (due to lack of time, computer memory or computer speed).

It happens that in many cases important for practice the order of ODEs can be reduced by several orders of magnitude without sacrificing precision. These include the simulation of accelerometers and gyroscopes, and many different electro-thermal devices.

The main emphasis of the course is on IDEAS rather than on MATHEMATICS. During the course you will learn:

• Some basics of control theory (a short review of the essential facts);
• How to reduce a linear system of ordinary differential equations by the truncated balanced approximation, by moment-matching methods, and by methods based on low-rank Grammian approximations;
• How to deal with nonlinear systems of ordinary differential equations;
• How to preserve design variable during model reduction;
• How to use the SLICOT library in order to solve practical problems;
• How to use mor4ansys (IMTEK software) in order to produce compact device models directly from ANSYS models;
• What other software is available for model reduction.

A short biography:
Evgenii B. Rudnyi (http://Evgenii.Rudnyi.Ru/) is from Institute for Microsystem Technology, Freiburg University, Germany (http://www.imtek.uni-freiburg.de/simulation/). Since 2001, he uses model order reduction to produce compact MEMS models for system-level simulation and design. He is a co-author of 9 journal and 26 conference papers (http://www.imtek.uni-freiburg.de/simulation/mor4ansys/publications.html) in which the new mathematical methods have been successfully applied to electro-thermal and mechanical MEMS devices. He has written software mor4ansys (http://www.imtek.uni-freiburg.de/simulation/mor4ansys/) that can perform model reduction directly for ANSYS models.